Characterization of a radio frequency hollow electrode discharge at low gas pressures

Autor:	Franz Faupel, Holger Kersten, Thomas Trottenberg, Thomas Strunskus, Amir Mohammad Ahadi, Stefan Rehders
Rok vydání:	2015
Předmět:	Physics Argon business.industry chemistry.chemical_element Dielectric barrier discharge Plasma Condensed Matter Physics Plasma polymerization Cathode law.invention chemistry law Electrode Optoelectronics Electrical measurements Plasma diagnostics Atomic physics business
Zdroj:	Physics of Plasmas. 22:083513
ISSN:	1089-7674 1070-664X
DOI:	10.1063/1.4929788
Popis:	A radio frequency (RF) hollow discharge configuration is presented, which makes use of a combination of RF plasma generation and the hollow cathode effect. The system was especially designed for the treatment of nanoparticles, plasma polymerization, and nanocomposite fabrication. The process gas streams through the plasma in the inner of the cylindrical electrode system. In the here presented measurements, pure argon and argon with oxygen admixtures are exemplarily used. The discharge is characterized by probe measurements in the effluent, electrical measurements of the discharge parameters, and visual observations of the plasma glow. It is found that the RF fluctuations of the plasma potential are weak. The plasma potential resembles the one of a DC hollow cathode discharge, the RF hollow electrode acts as a cathode due to the self-bias, and a high voltage sheath forms in its inner cylinder.
Databáze:	OpenAIRE
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