Study of a variable deposition angle effect on the structure of Ti-Pb composite coatings

Autor:	E. P. Kubatina, M. A. Lyakhovetskiy, S. Ya. Betsofen, S. S. Alexandrova, A. A. Lozovan
Rok vydání:	2018
Předmět:	Materials science Coating Composite number engineering Titanium alloy engineering.material Sputter deposition Composite material Deposition (law)
Zdroj:	IOP Conference Series: Materials Science and Engineering. 387:012049
ISSN:	1757-899X 1757-8981
DOI:	10.1088/1757-899x/387/1/012049
Popis:	The results of a study on a variable deposition angle effect on the structure of TiPb / TiPbN composite coatings sprayed on titanium alloy (VT6) substrates by magnetron sputtering are presented. The structures of coatings deposited on immobile and rotating substrates and obtained by co-sputtering a mosaic target of Ti and Pb are compared. It is shown that the differences in the incidence angles of the flow particles deposited on the substrates result in different mechanisms for coating structures formation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7e8fa7f12fca944c6c6a0153c9c3998b https://doi.org/10.1088/1757-899x/387/1/012049 Zobrazit plný text záznamu