Investigation of the effective net charge of strontium silicate layers on silicon substrates at changing annealing condition

Autor:	Shota Taniwaki, Shinichi Satoh, Atsushi Ogura, K. Arafune, Yasushi Hotta, Haruhiko Yoshida
Rok vydání:	2017
Předmět:	chemistry.chemical_compound Strontium Materials science chemistry Chemical engineering Silicon Annealing (metallurgy) chemistry.chemical_element Silicate
Zdroj:	Extended Abstracts of the 2017 International Conference on Solid State Devices and Materials.
DOI:	10.7567/ssdm.2017.j-1-06
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7d0faccc3c9ed01eea950b27bb023f47 https://doi.org/10.7567/ssdm.2017.j-1-06 Zobrazit plný text záznamu