Evaluation of Surface Oxidation Behavior on Silver Film for Active Oxygen Detector
| Autor: | Satoru Iwamori, Kazutoshi Noda, Suzuki Fumio, Shinobu Kinoshita, Hiroyuki Matsumoto, Shibata Yoshihisa, Tatsuyuki Iwasaki, Mikihiko Matsuoka, Kiyoshi Yoshino |
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| Rok vydání: | 2010 |
| Předmět: |
Chemistry
Analytical chemistry Surfaces and Interfaces Quartz crystal microbalance medicine.disease_cause Crystal X-ray photoelectron spectroscopy Scanning transmission electron microscopy medicine General Materials Science Thin film Instrumentation Layer (electronics) Quartz Spectroscopy Ultraviolet |
| Zdroj: | Journal of the Vacuum Society of Japan. 53:206-209 |
| ISSN: | 1882-4749 1882-2398 |
| DOI: | 10.3131/jvsj2.53.206 |
| Popis: | In this study, the mechanism of oxidation on silver-coated quartz crystal was investigated from the standpoint of future application to active oxygen monitoring under ultraviolet lamp processing. The effect of excited atomic oxygen (O (1D)) on the silver surface was monitored in real time utilizing the quartz crystal microbalance (QCM) method. To clarify the surface oxidation behavior on silver thin film, scanning transmission electron microscopy (STEM) and X-ray photoelectron spectroscopy (XPS) analyses were also performed. The results showed that the oxidation layer had a Ag2O structure and that the oxidation process progressed in three steps while the lamp was on. |
| Databáze: | OpenAIRE |
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