Diffusion Behavior at the Interface of (Ba,Sr)TiO3(BST)/Electrode/Buffer Layer/Si Epitaxial Multi-Layer Thin Film

Autor:	Naoki Wakiya, Akinori Higuchi, Haruki Ryoken, Hajime Haneda, Keiichi Fukunaga, Noriyoshi Shibata, Toshimasa Suzuki, Yuji Nishi, Kazuo Shinozaki, Nobuyasu Mizutani
Rok vydání:	2006
DOI:	10.4028/0-87849-982-2.257
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7bd53b776214a19ce69a5a07c02e6ab8 https://doi.org/10.4028/0-87849-982-2.257 Zobrazit plný text záznamu