Microstructure and tribological properties of Ti(Cr)SiCN coating deposited by plasma enhanced magnetron sputtering

Autor:	Nan Huang, Rong-hua Wei, Yongxiang Leng, Fan-qing Jiang, Qiang Li
Rok vydání:	2013
Předmět:	Materials science Metallurgy Titanium alloy chemistry.chemical_element Substrate (electronics) Tribology engineering.material Sputter deposition Condensed Matter Physics Microstructure Surfaces Coatings and Films Coating chemistry engineering Tin Instrumentation Solid solution
Zdroj:	Vacuum. 89:168-173
ISSN:	0042-207X
DOI:	10.1016/j.vacuum.2012.03.053
Popis:	Three kinds of hard coatings, TiSiCN, TiCrSiCN and CrSiCN were deposited on WC/Co alloys by plasma enhanced magnetron sputtering (PEMS) technique. Those coatings were comparatively studied with respect to their microstructure and mechanical properties. The sliding tribological behaviour of the coatings against Ti6Al4V counterpart was also studied by pin-on-disc tests. The results indicated that TiN and CrN were the main phase composition for the TiSiCN and CrSiCN coatings, respectively. While the TiCrSiCN coating consisted of TiCrN2 phases or Cr be incorporated in TiN as a single solid solution. The TiCrSiCN coating showed higher hardness than the CrSiCN coating, better adhesion with substrate than the TiSiCN coating, and higher dry sliding wear resistance against the Ti6Al4V counterpart than both TiSiCN and CrSiCN coatings.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7b52ec804373f010f700616f2670811c https://doi.org/10.1016/j.vacuum.2012.03.053 Zobrazit plný text záznamu Full Text from ScienceDirect