Measurement of Mobile Ion Contamination in Multilayer Metalization by Triangular Voltage Sweep

Autor:	Barbara Vasquez, Tom Tiwald, Tom Allen, Mark A. Chonko, Rajesh Khamankar
Rok vydání:	1994
Předmět:	Materials science Renewable Energy Sustainability and the Environment business.industry Analytical chemistry Contamination Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Ion Materials Chemistry Electrochemistry Optoelectronics business Voltage
Zdroj:	Journal of The Electrochemical Society. 141:1862-1866
ISSN:	1945-7111 0013-4651
DOI:	10.1149/1.2055018
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7a8f9c03a14763c02de51c19ea882e15 https://doi.org/10.1149/1.2055018 Zobrazit plný text záznamu