Surface hardening of SUS304 by irradiation with a KrF excimer laser in SiH4 gas ambient

Autor:	Koji Sugioka, Koichi Toyoda, Hideo Tashiro, Keigo Nagasaka, Eiichi Tamura
Rok vydání:	1990
Předmět:	Materials science Excimer laser Mechanical Engineering medicine.medical_treatment Doping Condensed Matter Physics Laser Hardness law.invention Mechanics of Materials law Hardening (metallurgy) medicine Surface modification General Materials Science Surface layer Irradiation Composite material
Zdroj:	Journal of Materials Research. 5:265-270
ISSN:	2044-5326 0884-2914
DOI:	10.1557/jmr.1990.0265
Popis:	Surface hardening of SUS304 resulting from the process of doping and deposition of Si by irradiation of a KrF excimer laser beam in a SiH4 gas ambient is investigated, and variations of the surface hardness are examined for different numbers of laser pulses and the laser fluences. The hardening is due to Si incorporation in high concentration. The continuous distribution of Si atoms across the surface layer suggests that a very high adhesion strength of the deposited Si films can be formed. The specific process for surface modification is referred to as laser implant-deposition (LID).
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::79ba48f96dc779f04b6b2ea59b0c1994 https://doi.org/10.1557/jmr.1990.0265 Zobrazit plný text záznamu Full text from SpringerLink