A Compact Microcontroller-Based MEMS Rate Integrating Gyroscope Module with Automatic Asymmetry Calibration
| Autor: | Tetsuro Itakura, Hiroshi Ota, Ryunosuke Gando, Shiori Kaji, Yasushi Tomizawa, Daiki Ono |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Rate integrating gyroscope business.industry 010401 analytical chemistry Electrical engineering Gyroscope 01 natural sciences 0104 chemical sciences law.invention Vibration Microcontroller law 0103 physical sciences Calibration Field-programmable gate array business Energy (signal processing) |
| Zdroj: | 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/mems46641.2020.9056317 |
| Popis: | This paper presents the first microcontroller-based module-level MEMS rate integrating gyroscope (RIG) for direct angle measurement after automatic asymmetry calibration. The 5-cm prototype module integrates a vacuum-sealed donut-mass gyroscope device on analog and digital PCBs. In automatic calibration mode, the initial frequency and decay-time asymmetries are electrically tuned and reduced by >40 and >18 times, respectively. The sensing mode is enabled by built-in digital controls of vibration energy and frequency. Continuous angle measurement is confirmed with an angular random walk (ARW) of 0.6 deg/rt-h and a bias instability (BI) of 4.3 deg/h, proving comparable performances with previous FPGA-based large RIG systems. This module paves the way for RIG commercialization studies. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|