High transparent and conductive undoped ZnO thin films deposited by reactive ion-beam sputtering
| Autor: | Iuliia Golovynska, Sergii Tkach, D. V. Myroniuk, Junle Qu, Mykhailo Dusheiko, Sergii Mamykin, Olena Olifan, A. I. Ievtushenko, Sergii Golovynskyi, Oleksandr Bykov |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science business.industry 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Acceleration voltage Surfaces Coatings and Films Sputtering Ellipsometry 0103 physical sciences Optoelectronics Electrical measurements Crystallite Thin film 0210 nano-technology business Instrumentation Wurtzite crystal structure |
| Zdroj: | Vacuum. 153:204-210 |
| ISSN: | 0042-207X |
| Popis: | High transparent and conductive undoped ZnO thin films deposited by reactive ion-beam sputtering on Si and glass substrates were studied. Our films were found to be polycrystalline ones having a hexagonal wurtzite structure with c-axis preferred orientation. In the course of experiments employing X-ray diffraction, energy dispersive X-ray analysis, multi-angle spectral ellipsometry, atomic force microscopy, optical transmission/reflection and electrical measurements, the influences of substrate temperature and accelerating voltage on the structural, optical and electrical properties of ZnO thin films were revealed and discussed. It was shown that the beneficial conditions for the growth of high-quality film are as follows: substrate temperature ranging in 200–250 °C and acceleration voltage ranging in 5–6 keV. O-rich condition of deposition helped to obtain p-type conductivity, which, however, was not stable over time. The best films with thickness nearly 100 nm demonstrated resistivities of ∼2 mOhm∙cm, being 86% transparent in visible light. Also, free electron concentration of ∼2 × 1020 cm−3 and mobility of ∼17 cm2 V−1s−1 were achieved. All this implies that the as-grown undoped ZnO films are promising for the application as high conductive transparent electrodes. |
| Databáze: | OpenAIRE |
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