Variable-Gap Silicon Photonic Waveguide Coupler Switch With a Nanolatch Mechanism
| Autor: | Kazuhiro Hane, Syotaro Abe |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Silicon photonics
Materials science business.industry Capacitive sensing Port (circuit theory) Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials Rat-race coupler law.invention law Optoelectronics Hybrid coupler Electrical and Electronic Engineering Photonics business Waveguide Electronic circuit |
| Zdroj: | IEEE Photonics Technology Letters. 25:675-677 |
| ISSN: | 1941-0174 1041-1135 |
| DOI: | 10.1109/lpt.2013.2248354 |
| Popis: | Design and fabrication of a variable-gap waveguide coupler switch with a nano latch mechanism are reported for on-chip waveguide circuits in Si photonics. The proposed switch consists of a coupler of two freestanding 400-nm-wide 260-nm-thick Si waveguides, three 30- $\mu{\rm m}$ -wide 40- $\mu{\rm m}$ -long comb-drive actuators, and a nanolatch mechanism. The nanolatch mechanism consists of four hook-shaped latches for maintaining a switch-on state at a coupler gap of around 100 nm. The switching and latching characteristics are investigated. The port isolation under the latch-on condition is found to be 17 dB. Due to the capacitive operation of the actuators and the nanolatch mechanism, power consumption of the switch is minimized. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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