Highly robust self-compliant and nonlinear TaOX/HfOX RRAM for 3D vertical structure in 1TnR architecture

Autor: Y. D. Lin, Y. S. Chen, K. H. Tsai, P. S. Chen, Y. C. Huang, S. H. Lin, P. Y. Gu, W. S. Chen, H. Y. Lee, S. Z. Rahaman, C. H. Hsu, F. T. Chen, T. K. Ku
Rok vydání: 2015
Předmět:
Zdroj: 2015 International Symposium on VLSI Technology, Systems and Applications.
DOI: 10.1109/vlsi-tsa.2015.7117559
Popis: Owing to NAND flash technology facing its scaling limit, resistive random access memory (RRAM) with simple film stack and no cross coupling issue between cells is a promising candidate for future high density memory application [1,2]. The 1TnR architecture with 3D vertical RRAM (VRRAM) structure realizes ultra-low bit cost for high compact density array [3,4]. However, this novel 1TnR structure and processes have not been proved yet. To meet requirements of VRRAM array operation, the nonlinear resistive memory with an excellent self-compliance and low current operation is indispensable [5,6]. A large voltage margin for the device operated with compliance current (ΔV COMP ) and high nonlinearity for the device at low resistance state (LRS) with reliable read voltage should be addressed.
Databáze: OpenAIRE