Microscanner with vertical out of plane combdrive
| Autor: | Harald Schenk, Denis Jung, David Kallweit, Thomas Grasshoff, Thilo Sandner |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
Scanner
Materials science Wafer bonding business.industry Microscanner Beam steering 02 engineering and technology 021001 nanoscience & nanotechnology 020210 optoelectronics & photonics Planar Optics Tilt (optics) 0202 electrical engineering electronic engineering information engineering Super video graphics array 0210 nano-technology business Raster scan |
| Zdroj: | 16th International Conference on Optical MEMS and Nanophotonics. |
| DOI: | 10.1109/omems.2011.6031051 |
| Popis: | This paper reports a new concept of quasi-static micro scanning mirrors enabling large static deflections and linearized scanning using vertical out-of-plane comb drives. The vertical combs are realized from a planar scanner substrate by a functionalized wafer bonding process The new device concept is highly flexible by design; different kinds of vertical combs (e.g. staggered and angular) can be realized without changing the process flow. First demonstrator devices are presented: a) quasi-static 1D-scanners with 4mm mirror diameter and 8° mechanical tilt angle for beam steering and b) a quasi-static / resonant 2D-scanner enabling 2D raster scanning with SVGA resolution. |
| Databáze: | OpenAIRE |
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