CMOS Closed-Loop Control of MEMS Varactors for Robust Ka -Band Tunable Filters
| Autor: | Derek Scarbrough, Renfeng Jin, James C. M. Hwang, Charles L. Goldsmith, Mohammad Javad Asadi, Guanghai Ding |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
010302 applied physics
Materials science business.industry Settling time Mechanical Engineering 020206 networking & telecommunications 02 engineering and technology 01 natural sciences Capacitance Resonator CMOS Control theory 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Optoelectronics Sensitivity (control systems) Electrical and Electronic Engineering business Varicap Voltage |
| Zdroj: | Journal of Microelectromechanical Systems. 28:910-918 |
| ISSN: | 1941-0158 1057-7157 |
| DOI: | 10.1109/jmems.2019.2929469 |
| Popis: | A closed-loop capacitance sensing and control mixed-signal CMOS circuit with a dedicated sensor electrode and a proportional-integral controller was designed to have a sensitivity of 1 fF, a settling time of $200~\mu \text{s}$ , and a voltage capacity of 150 V. In a hybrid integration with a MEMS varactor, the control circuit could switch the varactor capacitance from 270 to 365 fF in 15 ms and hold it within ±2% between 25 °C and 80 °C. Furthermore, using the varactor as the tuning element of a substrate-integrated-waveguide (SIW) resonator, the control circuit could tune its resonance frequency from 33.2 to 33.9 GHz while keeping it within ±0.08% over a temperature range of 25 °C–90 °C. The control circuit occupied an area of 1.7 mm2 and consumed 6 mW. The present closed-loop-controlled MEMS-tunable resonators could be used in a quartz SIW multi-pole filter to realize tunable, small, light, low-cost, robust, and reliable millimeter-wave filters that are critical to 5G and other future-generation communication and radar systems. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|