Autor:	Johannes Henriksson, Kyungmok Kwon, Ming C. Wu, Tae Joon Seok, Jianheng Luo
Rok vydání:	2019
Předmět:	Microelectromechanical systems Silicon photonics Fabrication Materials science Hardware_GENERAL business.industry Photonic integrated circuit Hardware_INTEGRATEDCIRCUITS Optoelectronics Port (circuit theory) business
Zdroj:	OECC/PSC
DOI:	10.23919/ps.2019.8817661
Popis:	Silicon photonic switches with port count greater than 200 is realized by combining low-loss micro-electro-mechanical-system (MEMS) switching mechanism with wafer-scale integration. We will review the design. fabrication. and experimental results of recently demonstrated 240×240 switches.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::72a552359cbe814a72d37c5a4a3362e5 https://doi.org/10.23919/ps.2019.8817661 Zobrazit plný text záznamu