Autor:	J. Trube, H.‐G. Lotz, M. Bender, P. Netuschil, U. Hoffmann, P. Sauer, A. Klöppel
Rok vydání:	2002
Předmět:	Materials science business.industry Sputtering OLED Evaporation Optoelectronics business Line (electrical engineering)
Zdroj:	SID Symposium Digest of Technical Papers. 33:891
ISSN:	0097-966X
DOI:	10.1889/1.1830926
Popis:	A profitable mass production of Organic Light Emitting Diode (OLED) displays needs a new type of manufacturing equipment. We present the concept of a vertical In-Line machine equipped with linear etch and linear evaporation sources for organic materials(small molecules) and sputter as well as evaporation sources for metals and ITO.
Databáze:	OpenAIRE
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