THE USE OF ORGANOMETALLIC COMPOUNDS IN CHEMICAL VAPOR DEPOSITION
Autor: | M. M. Mitchell, H. E. Podall |
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Rok vydání: | 2006 |
Předmět: |
History and Philosophy of Science
Hybrid physical-chemical vapor deposition Chemical engineering Chemistry Plasma-enhanced chemical vapor deposition General Neuroscience Deposition (phase transition) Chemical vapor deposition Combustion chemical vapor deposition General Biochemistry Genetics and Molecular Biology Group 2 organometallic chemistry |
Zdroj: | Annals of the New York Academy of Sciences. 125:218-228 |
ISSN: | 0077-8923 |
DOI: | 10.1111/j.1749-6632.1965.tb45392.x |
Databáze: | OpenAIRE |
Externí odkaz: |