Modeling, Simulation, Fabrication, and Characterization of a 10- $\mu$ W/cm2 Class Si-Nanowire Thermoelectric Generator for IoT Applications
| Autor: | Hiroya Ikeda, Yuhhei Suzuki, Takeo Matsuki, Hiroshi Inokawa, Yoshinari Kamakura, Takashi Matsukawa, Takehiro Kumada, Ryo Yamato, Shuichiro Hashimoto, Hiroki Takezawa, H. Zhang, Motohiro Tomita, Keisuke Shima, Mao Xu, Tianzhuo Zhan, Kazuaki Tsuda, Shunsuke Oba, Takanobu Watanabe, Kohhei Mesaki, Yuya Himeda |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Fabrication Materials science business.industry Thermal resistance Nanowire 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Electronic Optical and Magnetic Materials Temperature gradient Planar Thermoelectric generator 0103 physical sciences Thermoelectric effect Optoelectronics Electrical and Electronic Engineering 0210 nano-technology business Power density |
| Zdroj: | IEEE Transactions on Electron Devices. 65:5180-5188 |
| ISSN: | 1557-9646 0018-9383 |
| Popis: | We propose a planar device architecture compatible with the CMOS process technology as the optimal current benchmark of a Si-nanowire (NW) thermoelectric (TE) power generator. The proposed device is driven by a temperature gradient that is formed in the proximity of a perpendicular heat flow to the substrate. Therefore, unlike the conventional TE generators, the planar short Si-NWs need not be suspended on a cavity structure. Under an externally applied temperature difference of 5 K, the recorded TE power density is observed to be $12~\mu \text{W}$ /cm2 by shortening the Si-NWs length and suppressing the parasitic thermal resistance of the Si substrate. The demonstration paves a pathway to develop cost-effective autonomous internet-of-things applications that utilize the environmental and body heats. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|