Improvement in mechanical properties by ion implantation of SiC films deposited on steel and copper
Autor: | Lucia Calliari, D.C. Kothari, L. Guzman, Antonio Miotello, S. Tuccio, Nadhira Laidani |
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Rok vydání: | 1994 |
Předmět: |
Materials science
Silicon Ion beam mixing Metallurgy chemistry.chemical_element Surfaces and Interfaces General Chemistry Nitride Condensed Matter Physics Copper Fluence Surfaces Coatings and Films chemistry.chemical_compound Ion implantation chemistry Materials Chemistry Silicon carbide Thin film Composite material |
Zdroj: | Surface and Coatings Technology. 66:458-463 |
ISSN: | 0257-8972 |
DOI: | 10.1016/0257-8972(94)90049-3 |
Popis: | In this work we have implanted at various fluences silicon carbide (SiC) thin films deposited on AISI 316L stainless steel and oxygen-free high conductivity copper. It was observed that the improvements in the mechanical properties depend strongly on the ion fluence as well as on the ion species (Ar+, N+). High Ar+ fluence leads, by ion beam mixing, to the formation of a brittle Fe-Si interlayer which is deleterious with regard to the mechanical properties, as determined by scratch resistance tests. However, N+ implantation of SiC films can result in the formation of silicon carbonitrides and in particular the interface zone can be converted to iron-chromium nitrides. These composite multilayer structures on steel are suitable for obtaining surfaces with the optimum adhesion, friction and wear resistance properties. |
Databáze: | OpenAIRE |
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