Nanolithography Toolbox: Device design at the nanoscale

Autor:	Leonidas E. Ocola, Brian A. Bryce, B. R. Ilic, C. H. Ray, Meredith Metzler, James Alexander Liddle, Vojtech Svatos, Gregory Simelgor, David A. Czaplewski, G. Lopez, Richard Kasica, P. Neuzil, Marcelo Davanco, N. A. Bertrand, Christopher B. Wallin, Daron A. Westly, Ian Gilbert, Samuel M. Stavis, Krishna C. Balram, Qing Li, Thomas Michels, Slava Krylov, K. A. Dill, Juraj Topolancik, Vladimir A. Aksyuk, Karen E. Grutter, Yuxiang Liu, Kartik Srinivasan, Nicolae Lobontiu, Liya Yu
Rok vydání:	2017
Předmět:	0301 basic medicine Fabrication Computer science Nanotechnology Hardware_PERFORMANCEANDRELIABILITY 02 engineering and technology 021001 nanoscience & nanotechnology Software package Toolbox 03 medical and health sciences 030104 developmental biology Nanolithography Hardware_INTEGRATEDCIRCUITS 0210 nano-technology Nanoscopic scale Microscale chemistry Electron-beam lithography
Zdroj:	Conference on Lasers and Electro-Optics.
DOI:	10.1364/cleo_at.2017.ath3b.6
Popis:	We have developed a platform-independent software package for designing nanometer scaled device architectures. The Nanolithography Toolbox is applicable to a broad range of design tasks in the fabrication of microscale and nanoscale devices.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6b0db08f4d058482179f72c174a9fbf0 https://doi.org/10.1364/cleo_at.2017.ath3b.6 Zobrazit plný text záznamu