Formation of Flexible and Transparent Indium Gallium Zinc Oxide/Ag/Indium Gallium Zinc Oxide Multilayer Film
| Autor: | Sang-Woo Kim, Sun Kyung Kim, Tae Yeon Seong, Da Som Kim, Jeong Hwan Lee, Jun Ho Kim, Young Zo Yoo |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Indium gallium zinc oxide Materials science business.industry Oxide chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry 0103 physical sciences Materials Chemistry Polyethylene terephthalate Transmittance Optoelectronics Figure of merit Electrical and Electronic Engineering 0210 nano-technology business Sheet resistance Indium |
| Zdroj: | Journal of Electronic Materials. 45:4265-4269 |
| ISSN: | 1543-186X 0361-5235 |
| DOI: | 10.1007/s11664-016-4612-4 |
| Popis: | In this study, the electrical, optical, and bending characteristics of amorphous indium gallium zinc oxide (IGZO)/Ag/IGZO (39 nm/19 nm/39 nm) multilayer films deposited on polyethylene terephthalate (PET) substrate at room temperature were investigated and compared with those of Sn-doped indium oxide (ITO) (100 nm thick) films. At 500 nm the ITO film transmitted 91.3% and the IGZO/Ag/IGZO multilayer film transmitted 88.8%. The calculated transmittance spectrum of the multilayer film was similar to the experimental result. The ITO film and IGZO/Ag/IGZO multilayer film, respectively, showed carrier concentrations of 1.79 × 1020 and 7.68 × 1021 cm−3 and mobilities of 27.18 cm2/V s and 18.17 cm2/V s. The ITO film had a sheet resistance of 134.9 Ω/sq and the IGZO/Ag/IGZO multilayer film one of 5.09 Ω/sq. Haacke’s figure of merit (FOM) was calculated to be 1.94 × 10−3 for the ITO film and 45.02 × 10−3 Ω−1 for the IGZO/Ag/IGZO multilayer film. The resistance change of 100 nm-thick ITO film was unstable even after five cycles, while that of the IGZO/Ag/IGZO film was constant up to 1000 cycles. |
| Databáze: | OpenAIRE |
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