Piezoresistive cantilever for measuring mass of airborne particles
| Autor: | Sheng-Jui Chen, Chung-Lin Wu, Yen-Liang Lin |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
Fabrication
Piezoresistive cantilever Materials science Cantilever business.industry Analytical chemistry 02 engineering and technology 010501 environmental sciences 021001 nanoscience & nanotechnology 01 natural sciences Computer Science::Other Characterization (materials science) Stack (abstract data type) Q factor Physics::Atomic and Molecular Clusters Optoelectronics 0210 nano-technology business Excitation Strain gauge 0105 earth and related environmental sciences |
| Zdroj: | 2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO). |
| DOI: | 10.1109/nano.2016.7751463 |
| Popis: | This paper introduces a piezoresistive cantilever that is designed for measuring the mass of airborne particles. The principle of mass measurement is based on measuring the frequency shift in the mechanical resonant frequency due to an additional mass deposited on the cantilever. To detect the resonant frequency, piezoresistors are fabricated on the surface of the cantilever and utilized as a strain gauge. Excitation of the cantilever is provided by an external PZT stack. Preliminary results on sensor characterization and discussion are also given in the paper. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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