In Situ Simultaneous Observation of Phase Transition and Electrical Properties of Pb(Zr,Ti)O3 Thin Film by High Temperature XRD and Electrical Measurement Apparatus

Autor: Kazuo Shinozaki, Nobuyasu Mizutani, Koichi Seo, Toru Onoue, Takanori Kiguchi, Naoki Wakiya
Rok vydání: 2006
Předmět:
Zdroj: Key Engineering Materials. 320:53-56
ISSN: 1662-9795
DOI: 10.4028/www.scientific.net/kem.320.53
Popis: Pb(Zr0.05Ti0.95)O3/(La,Sr)CoO3 thin films were prepared by pulsed laser deposition (PLD) on SrTiO3(001) substrates. Phase transition behavior of Pb(Zr0.05Ti0.95)O3 (PZT) was investigated using high temperature X-ray diffraction (HT-XRD) and high-temperature electrical measurement. The phase transition temperature of PZT thin film is larger than bulk one. In 100 and 200nm-thickness epitaxial PZT thin films, the phase transition temperatures obtained from X-ray diffraction measurement and electrical property measurement are in good agreement.
Databáze: OpenAIRE