Hydrogenating Effect of Single-Crystal Diamond Surface

Autor:	Takeshi Kobayashi, Tetsuro Maki, Ken Sakuta, Syozo Shikama, Masaaki Komori, Yoshiyuki Sakaguchi
Rok vydání:	1992
Předmět:	Chemistry Material properties of diamond General Engineering Analytical chemistry General Physics and Astronomy Diamond engineering.material Acceptor Crystallinity Electron diffraction X-ray photoelectron spectroscopy hemic and lymphatic diseases engineering Single crystal MISFET
Zdroj:	Japanese Journal of Applied Physics. 31:L1446
ISSN:	1347-4065 0021-4922
Popis:	Hydrogenation of diamond has been carried out using the electron-cyclotron-resonance microwave plasma chemical-vapor deposition apparatus. According to reflection high-energy and low-energy electron diffraction and X-ray photoelectron spectroscopy measurements, the natural- and synthetic-diamond surfaces maintained their crystallinity even after the hydrogenation. Seebeck effect measurement and the temperature dependence of the resistance revealed an appearance of deep acceptor levels in the hydrogenated diamond layer. The diffusion depth of the hydrogen by the plasma treatment (2 h, 830°C) was roughly estimated to be ∼0.6 µm from the drain current-voltage characteristics of a rudimentary MISFET using the hydrogenated diamond.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6693557e52be813371cf5a77a669aeed https://doi.org/10.1143/jjap.31.l1446 Zobrazit plný text záznamu