(Invited) Tip Cleaning and Sample Design for High Resolution MOSCAP x-KPFM

Autor:	Martin Christopher Holland, James E. Royer, Joon Lee, Steven Bentley, Iain G. Thayne, Jian Shen, Sun-Ju Lee, Andrew C. Kummel, Wilhelm Melitz, Douglas Macintyre
Rok vydání:	2010
Předmět:	Materials science business.industry Sampling design Analytical chemistry Optoelectronics High resolution business
Zdroj:	ECS Transactions. 33:97-103
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.3481596
Popis:	Kelvin probe force microscopy (KPFM) is a unique technique that can provide two dimensional potential profiles inside a working device. A procedure is described to obtain high-resolution KPFM results on ultra-high vacuum (UHV) cleaved III-V MOSCAPs. Two tip preparation methods: field emission and Cr coating show reproducible high spatial and energy resolution KPFM images. A unique sample design has been developed which is compatible with UHV cross-sectional KPFM (x-KPFM). Key design features are high density of devices on the cleave face, a buried device interface, and a cleavable gate contact. Using x-KPFM, the first UHV cleaved MOSCAP surface potential mapping is demonstrated.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::667d521d0e9fb666fd5240a750ab024d https://doi.org/10.1149/1.3481596 Zobrazit plný text záznamu