Effect of surface passivation by a low pressure and temperature environment-grown thermal oxide layer for multi-crystalline silicon solar cells
| Autor: | Shun Sing Liao, Chuan Lung Chuang, Burhanuddin Yeop Majlis, Edward Yi Chang, Chang Fu Dee, Yueh Chin Lin |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Thermal oxidation
Materials science Silicon Passivation 020209 energy Energy conversion efficiency Metals and Alloys chemistry.chemical_element 02 engineering and technology Surfaces and Interfaces Carrier lifetime 021001 nanoscience & nanotechnology Surfaces Coatings and Films Electronic Optical and Magnetic Materials law.invention chemistry Chemical engineering law Solar cell 0202 electrical engineering electronic engineering information engineering Materials Chemistry Quantum efficiency Crystalline silicon 0210 nano-technology |
| Zdroj: | Thin Solid Films. 660:1-9 |
| ISSN: | 0040-6090 |
| DOI: | 10.1016/j.tsf.2018.05.047 |
| Popis: | In this study, we show that the efficiency and carrier life time of multi-crystalline silicon solar cells were significantly improved by using a low pressure (20,000 Pa) and temperature (650 °C~750 °C) environment grown thermal oxide (TO) as the surface passivation layer. In this experiment, during the first stage, the oxidation process was done at 650 °C and a lower pressure of 20,000 Pa for 2 mins under the flow a gas mixture of N2/O2 in ratio of 2:1. In the second stage, a temperature of 750 °C was used at the same pressure for the post-growth annealing process under a pure N2 ambient for 25 mins. Consequently, conversion efficiency was significantly increased by 0.55% with the surface passivation layer grown by low pressure and temperature TO process. The sheet resistance, carrier lifetime, internal quantum efficiency (IQE), increased by 6.32 Ω/sq., 22.18 μs, 4.33%, respectively, and the average reflection was reduced of 0.62%. Thus, the low pressure and temperature thermal oxidation process was an efficient way to increase the efficiency of the multi-crystalline silicon solar cells. |
| Databáze: | OpenAIRE |
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