| Autor: |
Kari Mönkkönen, Sini Kivi, Jouni Hiltunen, Victor V. Prokofiev, Hemmo Tuovinen, Mikko Juuti, Jarkko Mutanen, Maunu Toiviainen, Jarno J. J. Kaakkunen, Pertti Pääkkönen, J. Väyrynen, Janne Laukkanen, Markku Kuittinen |
| Rok vydání: |
2014 |
| Předmět: |
|
| Zdroj: |
SPIE Proceedings. |
| ISSN: |
0277-786X |
| DOI: |
10.1117/12.2061729 |
| Popis: |
In this study we tested ns-laser and an atomic layer deposition (ALD) for polishing and coating CNC-machined aluminum freeform mirrors that are used in a compact multipoint fiber optical probe. Two types of ALD coatings, aluminum oxide and silicon dioxide were tested. The surface roughness of mirrors was analyzed prior to and after nanosecond-laser polishing and coating them on a Beneq TFS 200 ALD device. The freeform aluminum mirrors with and without coatings were then measured with optical profiler. The results show that improvement in the surface roughness can be seen with ns-laser polished and ALD coated aluminum surfaces. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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