Role of Temperature, Pressure, and Surface Oxygen Migration in the Initial Atomic Layer Deposition of HfO2 on Anatase TiO2(101)

Autor:	Giulio D’Acunto, Rosemary Jones, Lucía Pérez Ramírez, Payam Shayesteh, Esko Kokkonen, Foqia Rehman, Florence Lim, Fabrice Bournel, Jean-Jacques Gallet, Rainer Timm, Joachim Schnadt
Rok vydání:	2022
Předmět:	General Energy Physical and Theoretical Chemistry Surfaces Coatings and Films Electronic Optical and Magnetic Materials
Zdroj:	The Journal of Physical Chemistry C. 126:12210-12221
ISSN:	1932-7455 1932-7447
DOI:	10.1021/acs.jpcc.2c02683
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::640d46e85475658da0c2aa6b04350f69 https://doi.org/10.1021/acs.jpcc.2c02683 Zobrazit plný text záznamu