On-scanner high-spatial-frequency overlay control using a distortion manipulator

Autor:	Friso Klinkhamer, Bart Smeets, Theo Thijssen, Francis Fahrni, Wim de Boeij, Mohamed El Kodadi, Thilo Pollak, Wolfgang Emer
Rok vydání:	2022
Zdroj:	Optical and EUV Nanolithography XXXV.
DOI:	10.1117/12.2614031
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::6290d06c423ea1d4b969f3a14504ff70 https://doi.org/10.1117/12.2614031 Zobrazit plný text záznamu