Composition and emission characterization and computational simulation of silicon rich oxide films obtained by LPCVD
| Autor: | Ciro Falcony, Carlos Domínguez, N. D. Espinosa-Torres, A. A. González-Fernández, A. Morales, G. Pedraza, F. Flores-Gracia, R. López-Estopier, Mariano Aceves-Mijares, S. Roman-Lopez |
|---|---|
| Rok vydání: | 2013 |
| Předmět: |
Silicon
Chemistry Oxide Analytical chemistry chemistry.chemical_element Surfaces and Interfaces General Chemistry Chemical vapor deposition Condensed Matter Physics Surfaces Coatings and Films Characterization (materials science) Computational simulation chemistry.chemical_compound Chemical engineering Materials Chemistry Composition (visual arts) |
| Zdroj: | Surface and Interface Analysis. 46:216-223 |
| ISSN: | 0142-2421 |
| DOI: | 10.1002/sia.5212 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|
Plný text