Iterative Learning Control for Quasi-Static MEMS Mirror with Switching Operation

Autor:	Matthias Macho, Han Woong Yoo, Richard Schroedter, Georg Schitter
Rok vydání:	2023
Zdroj:	2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS).
DOI:	10.1109/mems49605.2023.10052637
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::61ba649069b930ca5d93a2583e975348 https://doi.org/10.1109/mems49605.2023.10052637 Zobrazit plný text záznamu