| Autor: |
Walter Gumbrecht, Christian Paulus, D. Kuhlmeier, Eric Nebling, Petra Schindler-Bauer, R. Hintsche, J. Albers, Roland Thewes, Jürgen Krause, Meinrad Schienle, Alexander Frey, B. Holzapfl, F. Hofmann, K. Plehnert, Gerald Dr. Eckstein |
| Rok vydání: |
2003 |
| Předmět: |
|
| Zdroj: |
Digest. International Electron Devices Meeting. |
| DOI: |
10.1109/iedm.2002.1175886 |
| Popis: |
A sensor array for fully electronic detection of DNA molecules is fabricated using an extended CMOS process. A gold deposition process module and a compartment are integrated in the CMOS backend process. DNA detection is performed using a redox-cycling based electrochemical technique. Process and device issues and the impact of different processing variants on the circuit performance of the chip are discussed in detail. The result of biological experiments on chips with 128 positions are shown to prove the success of the chosen approach. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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