Crystal properties of atomic-layer deposited beryllium oxide on crystal and amorphous substrates
| Autor: | Jungwoo Oh, Woo Chul Lee, Christopher W. Bielawski, Yoonseo Jang, Seong Keun Kim, Jung Hwan Yum, Eric S. Larsen, Seung Min Lee |
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| Rok vydání: | 2019 |
| Předmět: |
Materials science
Beryllium oxide Condensed Matter Physics Electronic Optical and Magnetic Materials Amorphous solid Crystal chemistry.chemical_compound Atomic layer deposition chemistry Chemical engineering Materials Chemistry Crystal properties Electrical and Electronic Engineering Layer (electronics) |
| Zdroj: | Semiconductor Science and Technology. 34:115021 |
| ISSN: | 1361-6641 0268-1242 |
| DOI: | 10.1088/1361-6641/ab4824 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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