Characterization of granular Ag films grown by low-energy cluster beam deposition

Autor: Kristiaan Temst, Peter Lievens, Peter Thoen, Frederik Vanhoutte, W. Bouwen, M. J. Van Bael, Horst Weidele, Eddy Kunnen, Roger Silverans
Rok vydání: 1999
Předmět:
Zdroj: Thin Solid Films. 354:87-92
ISSN: 0040-6090
Popis: Free charged and neutral Ag n clusters were produced by a laser vaporization cluster source and deposited onto SiO 2 substrates resulting in cluster films. These films were characterized by atomic force microscopy, X-ray diffraction and resistivity measurements to determine film topography, grain sizes, dimensions of the coherent scattering regions perpendicular to the film plane, and the mean free path length of the conduction electrons. An Ag film grown by molecular beam deposition was investigated using the same characterization techniques. The results show that the deposited clusters keep at least part of their shape upon impact on the substrate, giving rise to growth patterns and film properties distinctly different from those of conventionally grown films.
Databáze: OpenAIRE