Mass sensor for in situ monitoring of focused ion and electron beam induced processes

Autor:	Ivo Utke, Vinzenz Friedli, Christian Santschi, Patrik Hoffmann, Johann Michler
Rok vydání:	2007
Předmět:	Cantilever Physics and Astronomy (miscellaneous) Chemistry business.industry Resonance Electron Focused ion beam Ion Vacuum deposition Cathode ray Deposition (phase transition) Optoelectronics Atomic physics business
Zdroj:	Applied Physics Letters. 90:053106
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.2435611
Popis:	A cantilever-based mass sensor for in situ monitoring of deposition and milling using focused ion and electron beams is presented. Carefully designed experiments allowed for mass measurements with a noise level of ±10fg by tracking the resonance frequency of a temperature stabilized piezoresistive cantilever using phase locking. The authors report on measurements of precursor surface coverage, residence time, mass deposition rates, yields, and deposit density using the (CH3)3PtCpCH3 precursor.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5fb273164ec573ec04dfcc47d9bf5636 https://doi.org/10.1063/1.2435611 Zobrazit plný text záznamu