High-quality micro/nano structures of 4H-SiC patterning by vector femtosecond laser

Autor:	Bing Dong, Zongwei Xu, Changkun Shi, Kun Zhang, Yuheng Zhang, Rushuai Hua, Wei Zhao, Jianshi Wang
Rok vydání:	2023
Předmět:	Electrical and Electronic Engineering Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics & Laser Technology. 163:109338
ISSN:	0030-3992
DOI:	10.1016/j.optlastec.2023.109338
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::5f96b41c7d2a3973b23b1dd81057b9de https://doi.org/10.1016/j.optlastec.2023.109338 Zobrazit plný text záznamu Full Text from ScienceDirect