Liquid source chemical vapor deposition of high-dielectric-constant (Ba, Sr)TiO3 films
| Autor: | Kouichi Ono, Akimasa Yuuki, Takaaki Kawahara, Mikio Yamamuka |
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| Rok vydání: | 1998 |
| Předmět: |
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Thesaurus (information retrieval) Chemical substance Materials science media_common.quotation_subject Energy Engineering and Power Technology Chemical vapor deposition Search engine Chemical engineering Electronic engineering Electrical and Electronic Engineering Science technology and society High-κ dielectric media_common |
| Zdroj: | Electrical Engineering in Japan. 125:47-54 |
| ISSN: | 1520-6416 0424-7760 |
| DOI: | 10.1002/(sici)1520-6416(199810)125:1<47::aid-eej6>3.0.co;2-j |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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