Aqueous tape casting of Al2O3 for multilayer co-fired ceramic based microfluidic chips with translucent windows
| Autor: | Richard E. Eitel, Jin Luo |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
Tape casting
Materials science Fabrication Process Chemistry and Technology Microfluidics Sintering 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology 01 natural sciences Casting 0104 chemical sciences Surfaces Coatings and Films Electronic Optical and Magnetic Materials visual_art Materials Chemistry Ceramics and Composites Slurry visual_art.visual_art_medium Ceramic Co-fired ceramic Composite material 0210 nano-technology |
| Zdroj: | Ceramics International. 44:3488-3491 |
| ISSN: | 0272-8842 |
| DOI: | 10.1016/j.ceramint.2017.11.076 |
| Popis: | Multilayer co-fired ceramic (MLCC) material systems and fabrication methods allow the easy fabrication of three dimensional features and integration of microfluidic channels and cavities into monolithic ceramic modules. In this work, an alumina based multilayer co-fired ceramic formulation and sintering methods suitable for producing transparent ceramic microfluidic modules is developed. Alumina slurries with high solid loading were prepared using an aqueous Duramax™ B-1000 binder systems. The rheological properties and casting behavior were studied for slurries with varying the binder additions. Sintering behavior of the green tapes were studied as well. Fundamental results indicated that the transparency of the ceramic with density over 3.98 g/cm3 can be greatly improved after long time sintering at 1612 °C in the H2. Finally, a microfluidic MLCC module with transparent window was demonstrated by patterning, laminating, and sintering the developed Al2O3 green tapes. |
| Databáze: | OpenAIRE |
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