Preparation of Hybrid Films of Aromatic polyimide by Vapor Deposition Polymerization

Autor: Masayuki Iijima, Yoshikazu Takahashi, Masa-aki Kakimoto, Yoshio Imai
Rok vydání: 1992
Předmět:
Zdroj: Journal of Photopolymer Science and Technology. 5:351-358
ISSN: 1349-6336
0914-9244
Popis: A polyimide film was prepared by the vapor deposition polymerization method using a diamine monomer containing siloxane bond and PMDA. The obtained film had an excellent adhesive property to a glass substrate. On the other hand, a polyimide film, prepared from fluorine containing diamine and tetracarboxylic dianhydride in the same manner, had the relative dielectric constant of 3.05-3.1, which was lower than that of the conventional polyimide.A hybrid polyimide film could be formed by depositing 6FDA and the siloxane bond-containing diamine on the surface of the substrate, and then gradually replacing the diamine with the fluorine containing monomer. This film could realize the improvement of adhesion to the substrate and the decrease of the dielectric constant at the same time.
Databáze: OpenAIRE