Low-temperature atmospheric pressure chemical vapor deposition of titanium disulfide films
| Autor: | Charles H. Winter, T. Suren Lewkebandara, James W. Proscia |
|---|---|
| Rok vydání: | 1992 |
| Předmět: |
chemistry.chemical_classification
Hybrid physical-chemical vapor deposition Titanium disulfide General Chemical Engineering Inorganic chemistry General Chemistry Chemical vapor deposition Combustion chemical vapor deposition chemistry.chemical_compound Carbon film chemistry Materials Chemistry Deposition (phase transition) Thin film Inorganic compound |
| Zdroj: | Chemistry of Materials. 4:1144-1146 |
| ISSN: | 1520-5002 0897-4756 |
| DOI: | 10.1021/cm00024a007 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
|