| Autor: |
Bart G. Scholte van Mast, C. N. Berglund, Jack M. Mccarthy, J. L. House, G. Janaway, Suresh W. Gosavi |
| Rok vydání: |
2001 |
| Předmět: |
|
| Zdroj: |
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures. 19:2591 |
| ISSN: |
0734-211X |
| DOI: |
10.1116/1.1418414 |
| Popis: |
Multi-electron beam lithography has been proposed as a promising approach to achieve high throughput for mask writing and direct wafer writing. Laser driven photocathodes represent an attractive candidate for multiple beam, high brightness sources. Thin film gold photocathodes that can be handled in air are of particular interest because of their potential for practical sources. In this article we present a study of the degradation mechanisms that change photocurrent yield for thin film gold photocathodes. Two general degradation mechanisms were studied: microstructural changes of the gold thin film and surface reactions. Observed microstructural changes included loss of gold coverage of the sapphire substrate, gold grain growth and an increase in surface roughness. A titanium adhesion layer was shown to stabilize coverage and proved stable to 700 °C by in situ transmission electron microscopy (TEM) experiments on planar sections of the Au/Ti/sapphire thin film stack photocathode. Reactions at the surface... |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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