BEOL Design and RF Performance of Stacked Si Nanosheets and Nanowires
| Autor: | Hsin-Cheng Lin, Kuan-Ying Chiu, Ching-Wang Yao, Tao Chou, Tsai-Yu Chung, C. W. Liu |
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| Rok vydání: | 2023 |
| Zdroj: | 2023 International VLSI Symposium on Technology, Systems and Applications (VLSI-TSA/VLSI-DAT). |
| DOI: | 10.1109/vlsi-tsa/vlsi-dat57221.2023.10134110 |
| Databáze: | OpenAIRE |
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