Sputtering Si-Co alloy targets

Autor: I. G. Kolesnikov, Yu. V. Kuz’mich, B. M. Freidin, V. I. Serba, D. L. Rogachev
Rok vydání: 2008
Předmět:
Zdroj: Russian Metallurgy (Metally). 2008:529-532
ISSN: 1555-6255
0036-0295
DOI: 10.1134/s003602950806013x
Popis: The effect of the cooling rate on the microstructure, micromechanical characteristics, and residual thermal stresses of targets from a Si-30% Co alloy is studied. The required quality of the targets from this alloy can be obtained at a cooling rate in the range 5–50°C/s. The alloy structure is homogeneous and fine-grained and is characterized by high strength properties. The level of residual stresses in the target is minimal, and their distribution is uniform.
Databáze: OpenAIRE
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