Theoretical and Experimental Evaluation of the Electrical Parameters of a Holographic Microscope

Autor:	Andrey G. Karpov, A. G. Fedorov, L. I. Antonova, Nikolay Egorov, V. V. Trofimov
Rok vydání:	2020
Předmět:	Microscope Materials science business.industry Detector Continuous monitoring Resolution (electron density) Holography Substrate (printing) Experimental research Surfaces Coatings and Films law.invention Optics law Thin film business
Zdroj:	Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques. 14:1061-1065
ISSN:	1819-7094 1027-4510
Popis:	The presented system for the theoretical and experimental evaluation of images obtained in a holographic microscope can be directly used for the diagnostics of industrial products during the manufacturing process. It is found that controlling the positioning of the cathode–research object in a holographic microscope can be effectively carried out by monitoring the substrate current. The resolution of the coordinate-sensitive detector of the microscope is calculated to be 400−0.4 nm. It is shown that continuous monitoring of the conditions of experimental research is necessary to obtain an informative image because each object under study is essentially unique. Test studies of thin aluminum films are performed.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::571af98951db171e37794689fcdfae7f https://doi.org/10.1134/s1027451020050250 Zobrazit plný text záznamu Full text from SpringerLink