Si1−xGex/Si multiple quantum wells on Si(100) and Si(110) for infrared absorption

Autor: T. L. Kreifels, R. L. Hengehold, Yung Kee Yeo, Phillip E. Thompson, David S. Simons
Rok vydání: 1995
Předmět:
Zdroj: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 13:636-641
ISSN: 1520-8559
0734-2101
DOI: 10.1116/1.579798
Popis: Optical emission and absorption properties of Si1−xGex/Si superlattices grown on (100) and (110) Si substrates were investigated to determine the optimal growth conditions for these structures to be used as infrared detectors. Fully strained Si1−xGex/Si superlattices were grown by molecular beam epitaxy (MBE) and examined using low‐temperature photoluminescence to identify no‐phonon and phonon‐replica interband transitions across the alloy band gap. Phonon‐resolved emission was most intense for undoped quantum wells grown at 710 °C for both silicon orientations. Room‐temperature absorption measurements were conducted on (100) and (110) Si1−xGex/Si superlattices using Fourier transform spectroscopy while varying incident electric field polarization. Strong intersubband absorption was observed at 7.8 μm from a sample composed of 15 quantum wells of 40 A Si0.8Ge0.2 separated by 300 A of Si grown on (100) Si by MBE at 550 °C. Valence band wells were doped with a boron concentration of 5×1019 cm−3. No intersub...
Databáze: OpenAIRE