Surface potential probe operated at 77 K with nanosecond response

Autor:	W. C. de Zeeuw, R.G. van Welzenis
Rok vydání:	1977
Předmět:	Surface (mathematics) Optics Materials science Computer control Semiconductor business.industry Wafer Time resolution Nanosecond business Instrumentation Image resolution
Zdroj:	Review of Scientific Instruments. 48:1326-1332
ISSN:	1089-7623 0034-6748
DOI:	10.1063/1.1134875
Popis:	We describe the design, construction, and performance of an instrument for time‐resolved surface potential distribution measurements on fragile specimens of small dimensions, e.g., semiconductor bars or wafers. The instrument can operate at 77 K and is easily adapted to computer control. Spatial resolution is about 10 μm in two dimensions. On low‐resistivity material a time resolution of 1 ns can be achieved.
Databáze:	OpenAIRE
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