Experimental and Numerical Analysis of Slurry Flow in Chemical Mechanical Polishing

Autor:	Youngbin Yoon, Dohyung Lee, Mirza Waqar Baig
Rok vydání:	2008
Předmět:	Materials science Particle image velocimetry business.industry Numerical analysis Chemical-mechanical planarization General Physics and Astronomy Mechanics Computational fluid dynamics business Slurry flow
Zdroj:	Journal of the Korean Physical Society. 53:2129-2137
ISSN:	0374-4884
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::54ab7126fa65b7438c56ed2b005eedbb https://doi.org/10.3938/jkps.53.2129 Zobrazit plný text záznamu