TEM-Zielpräparation in einer Stunde - Utopie oder realistisches Ziel/ TEM Target Preparation within one Hour: Utopia or a Realistic Goal
| Autor: | Hans-Jürgen Engelmann, J. Fritsche, Beate Volkmann, Ehrenfried Zschech, W. Blum |
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| Rok vydání: | 2002 |
| Předmět: |
Very-large-scale integration
Materials science business.industry Metals and Alloys Nanotechnology Condensed Matter Physics Focused ion beam Electronic Optical and Magnetic Materials Preparation method Transmission (telecommunications) Mechanics of Materials Transmission electron microscopy Microelectronics business Electron microscopic |
| Zdroj: | Practical Metallography. 39:117-125 |
| ISSN: | 2195-8599 0032-678X |
| Popis: | Transmission electron microscopy (TEM) gains increasing importance in characterizing microelectronic components since the characteristic structures become smaller and smaller. Transmission electron microscopic investigations need specially prepared samples. The known conventional preparation techniques require a large amount of time. However, the Focused Ion Beam (FIB) method makes it possible to prepare samples for TEM within a short time and with a high success rate. In this paper, target preparation using the FIB method is described with reference to examples for VLSI components. Possible ways and limits of this preparation method are discussed subsequently. |
| Databáze: | OpenAIRE |
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