Overview of stitching for high NA: imaging and overlay experimental and simulation results
| Autor: | Natalia V. Davydova, Lieve van Look, Vincent Wiaux, Joost Bekaert, Frank Timmermans, Eelco van Setten, Bram Slachter, Laura L. Huddleston, Claire van Lare, Rongkuo Zhao, Dezheng Sun, Ming-Chun Tien, Marcel Beckers, Simon van Gorp, Cees Lambregts, Chung-Tien Li, Arthur van de Nes, Koen D'Havé, Tatiana Kovalevich, Diederik de Bruin, Stephen Hsu, Rene Carpaij |
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| Rok vydání: | 2023 |
| Zdroj: | Optical and EUV Nanolithography XXXVI. |
| Databáze: | OpenAIRE |
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