Structural and electrical properties of Ta2O5 thin films deposited on Si from Ta(OC2H5)5 precursor
| Autor: | Luca Lozzi, Vicenzo Salerni, Sandro Santucci, P. Picozzi, Florence Jolly, Maurizio Passacantando |
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| Rok vydání: | 2003 |
| Předmět: |
Atmospheric pressure
Photoemission spectroscopy Chemistry Annealing (metallurgy) Analytical chemistry Mineralogy Chemical vapor deposition Condensed Matter Physics Electronic Optical and Magnetic Materials law.invention law Electrical resistivity and conductivity Materials Chemistry Ceramics and Composites Electrical measurements Crystallization Thin film |
| Zdroj: | Journal of Non-Crystalline Solids. 322:233-239 |
| ISSN: | 0022-3093 |
| DOI: | 10.1016/s0022-3093(03)00207-2 |
| Popis: | Thin ( |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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